Semiconductor
From materials development to production test and monitoring, Keithley is the leader in semiconductor test solutions you can trust. In the development lab, Keithley semiconductor characterization systems provide unmatched sensitivity and flexibility for investigating material properties, describing device attributes, and qualifying new designs. Keithley is also at the leading edge of automated parametric test technology for production process monitoring, and has pioneered many innovations that shorten test cycles and lower the cost of test. Examples are APT systems that provide parallel DC and RF measurements with a single probe insertion and semiconductor characterization system software and GUIs that provide test sequences and results with a few mouse clicks. Keithley systems are also designed for maximum equipment reuse as test needs change, and for easy interfacing to a wide variety of other equipment, such as parts handlers, high speed switches, and signal sources for specialized testing. To learn more about Keithley’s semiconductor test systems, click on the links below.
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Device Characterization
- Focus Solutions
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Capacitors - Capacitance, charge, low current, breakdown voltage
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Device Modeling - Data Acquisition and parameter extraction
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Diodes - High breakdown voltage, I-V curves
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Nanoelectronic devices - C-V characterization
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Nanoelectronic devices - Low resistance measurements
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Nanoelectronic devices - Nanoelectronic and molecular electronic I-V curves
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Resistors - Wide dynamic range, high testing accuracy, fast measurements
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Transistors - I-V, C-V measurements
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Functional Test
- Focus Solutions
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Customized flexible low-volume functional test - Test sequence list, Fast pass/fail, binning/sorting, RF
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IDDQ (SOC and other highly integrated devices) - Source V, measure low current
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Optical ICs and transceivers - Source V, measure I; Source I, measure V
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Transistors - I-V, C-V measurements
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Materials Research
- Focus Solutions
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Conductor/interconnect materials - Low current measurements
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Conductor/interconnect materials - Low resistance and capacitance measurements
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Dielectric Materials - Low current, breakdown voltage, charge characterization
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Insulators - High resistance measurements
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Semiconductors - Resistivity measurements
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Semiconductors - Stress test for reliability
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Superconductors - Fast, low noise measurements of low resistances
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Process Monitoring
- Focus Solutions
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End-of-line wafer acceptance - Transistors (Vt), diodes, capacitors, resistors, gate delay
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Equipment qualification - Defect density
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Gate/poly - MOSCAP GOI, ECD, Vt
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Metal-2 - Contact check, electromigration, EWR
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New Technologies - RF/DC, SOC, FeRAMs, MRAMS, LCD-TEGs
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Reliability Test Solutions
- Focus Solutions
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Accelerated Stress Testing (AST) - Source power, monitor temperature, measure multiple DUT
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Monitor and log lab environmental parameters - Temperature and humidity measurement, distributed/remote communication, long life
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Quality Assurance Testing (QAT) - Modular building blocks for custom-built solutions, drivers to support control and communication
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Wafer level hot carrier degradation - High accuracy, low noise, the ability to stress multiple transistors in parallel and measure small degradations