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Automated Characterization Suite (ACS)

What is ACS?

ACS is a powerful software framework for engineers performing a wide range of tests for detailed characterization of semiconductor devices. Use ACS with Keithley’s broad line of industry-leading SMU instruments and systems. Automate testing at the wafer or cassette level controlling automated probers with standard ACS. For manual or single device testing, consider ACS Basic Edition. And for advanced multi-DUT wafer level reliability (WLR), use standard ACS with the ACS-2600-RTM option. Or learn more below about various applications, measurement hardware, and ACS capabilities!


Die Sort

Keithley provides high-speed solutions for on-wafer die sort or known good die (KGD) testing of semiconductor components, sensors, MEMS, and small-scale analog ICs – devices that can be tested and binned exclusively with precision SMU instrumentation or IV measurements. Explore Keithley’s range of “Measurement Capabilities” and corresponding descriptions below.

Click on a Measurement Capability on the left to view it's Description

ACS Software
ACS Software

ACS supports a wide range of fully automatic probers for on-wafer die sort testing. Create wafer maps and projects involving thousands of die per wafer. ACS provides full results visibility throughout testing with its multi-DUT statistics and binning analysis during run-time. Click here for more information.

System SourceMeter SMU Instruments - Series 2600B
2600B SMU family

Series 2600 SourceMeter SMU instruments provide the backbone for Keithley on-wafer die sort systems. Synchronize multiple SMU channels using Keithley’s test script processor (TSP) technology enabling high-speed testing of multiple devices in parallel. Several models exist covering various current and voltage ranges from 1fA to 100A and 100nV to 3kV. Click here for more information.

S500 Integrated Test Systems
S500

For parallel device on-wafer die sort testing, S500 integrated test systems deliver up to 44 source-measure channels. Based on the Series 2600 System SourceMeter SMU instruments, S500 systems perform fast synchronized measurements across all devices in a full turnkey system. Click here for more information.

Parametric Test

ACS can be used for process control monitoring (PCM) and other related applications. Because of its rich interactive GUI, it is designed more for low-volume or lab applications with a variety of semi-custom hardware configurations.

Click on a Measurement Capability on the left to view it's Description

ACS Software
ACS Software

ACS supports a wide range of semi-automatic and fully automatic probers for measuring production-wafer test structures. Designed mainly for use by device engineers in a lab or offline setting, ACS provides a rich GUI for interactive testing, frequent adjustments to test plans, and in-depth results analysis. Click here for more information.

S500 Integrated Test Systems
S500

S500 Integrated Test Systems provide custom configurations to meet specific parametric measurement requirements outside the standard configurations of Keithley’s S530 Parametric Test System. Choose from a wide range of instrument measurement capability, and system configurations with or without switching. Click here for more information.

S530 Parametric Test Systems
S530

In addition to fast precise measurements, S530 Parametric Test Systems include system-level specifications, diagnostics, and SEMI standards compliance. While KTE is the standard S530 software to meet full production requirements, ACS can alternatively be used with the S530 for more interactive testing in a lab or offline environment. Click here for more information.

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