Component Characterization
Create and manage a wide variety of in-depths tests and measurement results for discrete semiconductor components such as MOSFETs, bipolar transistors, diodes, high-power IGBTs, and more. Explore Keithley’s wide range of “Measurement Capabilities” and corresponding descriptions below.
Click on a Measurement Capability on the left to view it's Description
ACS Software
ACS supports a wide range of semi-automatic and fully automatic probers for semiconductor component measurements across an entire wafer. Or control the prober interactively for testing individual devices. Monitor testing progress with individual device results and multi-device statistics during run-time. Click here for more information.
ACS Basic Edition Software
ACS Basic Edition is primarily for semiconductor component testing with manual probe stations or test fixtures. Perform initial device characterization quickly and interactively with “Trace Mode”. Or create detailed parameter extraction tests using the GUI-based set-up screen and extensive measurement libraries. Quickly, ACS Basic leads to real-time results for analysis within ACS Basic or for export to other offline analysis tools. Click here for more information.
Series 2600B System SourceMeter® Source Measure Unit (SMU) Instruments
Series 2600B SourceMeter SMU Instruments include dual-channel units, optimal for testing multi-terminal semiconductors such as MOSFETs and BJTs. And Keithley’s TSP-Link® provides coordinated control and precise timing between SMU instruments. Choose from a wide variety of models from the Series 2600 family to meet specific voltage and current specifications. Click here for more information.
Series 2650A High Power System SourceMeter Source Measure Unit (SMU) Instruments
The Series 2650A High Power SourceMeter SMU Instruments can be used in a variety of test configurations. Source and measure 3kV or 50A pulse up to 2000W pulse or 200W DC. And best-in-class low current capability provides outstanding leakage measurements. Use Keithley’s TSP-Link® for integrated system configurations with lower power Series 2600B SourceMeter SMU Instruments. Click here for more information.
PCT Configurations
Keithley's Parametric Curve Tracer configurations are complete characterization solutions for power device characterization, including high performance instruments, cables, test fixturing, and software. Seven configurations are available, each providing both real-time trace mode for quickly checking fundamental device parameters like breakdown voltage and full parametric mode for extracting precise device parameters. Click here for more information.
Model 4200-SCS Parameter Analyzer
The 200V/1A SMU and 400V C-V capabilities of the Model 4200-SCS Parameter Analyzer are ideal for semiconductor component characterization. Configure the 4200-SCS with 2650A High Power SourceMeter SMU Instruments for testing up to 3kV or 50A. Create and execute tests across this range of Keithley capabilities with ACS Basic Edition software. Click here for more information.
S500 Integrated Test Systems
Experience full turnkey solutions from Keithley with S500 Integrated Test Systems. These highly configurable systems can incorporate a wide range of measurement capability for technology development test stations. Or use the automation of ACS with S500 systems for high throughput multi-device testing with automated wafer probers. Click here for more information.
IC Device Characterization
Create and manage a wide variety of in-depths tests, measurement results, and parameter extractions for various IC devices and test structures including MOSFETs, MOSCAPs, diodes, reliability test structures, and more. Explore Keithley’s wide range of “Measurement Capabilities” and corresponding descriptions below.
Click on a Measurement Capability on the left to view it's Description
ACS Software
ACS supports a wide range of semi-automatic and fully automatic probers for semiconductor IC device characterization across an entire wafer. Or control the prober interactively for testing individual devices. Monitor testing progress with individual device results and multi-device statistics during run-time. Click here for more information.
ACS Basic Edition Software
Use ACS Basic Edition with a dual-channel Series 2600B System Sourcemeter SMU Instrument as a simple I-V parameter analyzer. Create and run individual measurements or a sequence of measurements on individual semiconductor devices with manual probe stations or test fixtures. Instantly see measurement results in graphical or table formats. Click here for more information.
Series 2600B System SourceMeter® Source Measure Unit (SMU) Instruments
Use a dual-channel Series 2600B System Sourcemeter SMU Instrument along with ACS Basic Edition as simple I-V parameter analyzer. Or combine multiple 2600B units with ACS to perform automated wafer-level testing. Keithley’s TSP-Link® provides coordinated control and precise timing between SMU instruments with or without Keithley's Semiconductor Switching.
Model 4200-SCS Parameter Analyzer
The Model 4200-SCS Semiconductor Parameter Analyzer delivers IV, CV, Pulse, and Ultra-Fast IV – all the measurement capability necessary to fully characterize IC-related devices, materials, and processes – in one integrated solution. Automate testing at the wafer or cassette level by adding ACS with or without Keithley's Semiconductor Switching. Click here for more information.
S500 Integrated Test Systems
For interactive and automated IC device characterization, S500 Integrated Test Systems typically include precise high-speed IV measurements with Series 2600 SourceMeter SMU units, and additional CV, pulse, and Ultra-Fast IV measurement capability with the Model 4200-SCS Parameter Analyzer. Fully integrated with switching, cabling, probe card interface, and ACS software, S500 systems provide a full turn-key solution ideal for the lab. Click here for more information.
Wafer Level Reliability
ACS includes a variety of test modules and projects for HCI, NBTI, TDDB, EM, and more. And Keithley’s wide range of source-measure instrumentation and systems extend into high channel count parallel testing, ultra-fast NBTI, and high voltage Vds breakdown testing. Explore Keithley’s wide range of “Measurement Capabilities” and corresponding descriptions below
Click on a Measurement Capability on the left to view it's Description
ACS Software
ACS supports a wide range of semi-automatic and fully automatic probers for WLR measurements across an entire wafer. Or control the prober interactively for testing individual devices. Monitor testing progress with individual device results and multi-device statistics during run-time. Click here for more information.
ACS-2600-RTM
ACS-2600-RTM is an option to ACS that centers around the speed and scalability of the Series 2600B System SourceMeter® SMU instruments. Test devices individually or in parallel with high channel-count systems. Click here for more information.
4200 with PMU
Development of leading-edge CMOS comes with its challenges including NBTI testing which requires extremely fast measurements and minimal relaxation time. The Ultra-Fast BTI option to the Model 4200 provides sub-microsecond measurements and a variety of measurement methods used by leading semiconductor researchers. Click here for more information.
System SourceMeter SMU Instruments - Series 2600B
Perform WLR tests on individual devices with a dual-channel 2600 sourcemeter SMU instrument. And its test script processor (TSP) technology enables synchronized high channel-count systems for testing many devices in parallel. Click here for more information.
S500 Integrated Test Systems
For parallel device WLR testing, S500 integrated test systems deliver up to 44 source-measure channels. Based on the Series 2600 System SourceMeter SMU instruments, S500 systems perform fast synchronized measurements across all devices in a full turnkey system. Click here for more information.
Die Sort
Keithley provides high-speed solutions for on-wafer die sort or known good die (KGD) testing of semiconductor components, sensors, MEMS, and small-scale analog ICs – devices that can be tested and binned exclusively with precision SMU instrumentation or IV measurements. Explore Keithley’s range of “Measurement Capabilities” and corresponding descriptions below.
Click on a Measurement Capability on the left to view it's Description
ACS Software
ACS supports a wide range of fully automatic probers for on-wafer die sort testing. Create wafer maps and projects involving thousands of die per wafer. ACS provides full results visibility throughout testing with its multi-DUT statistics and binning analysis during run-time. Click here for more information.
System SourceMeter SMU Instruments - Series 2600B
Series 2600 SourceMeter SMU instruments provide the backbone for Keithley on-wafer die sort systems. Synchronize multiple SMU channels using Keithley’s test script processor (TSP) technology enabling high-speed testing of multiple devices in parallel. Several models exist covering various current and voltage ranges from 1fA to 100A and 100nV to 3kV. Click here for more information.
S500 Integrated Test Systems
For parallel device on-wafer die sort testing, S500 integrated test systems deliver up to 44 source-measure channels. Based on the Series 2600 System SourceMeter SMU instruments, S500 systems perform fast synchronized measurements across all devices in a full turnkey system. Click here for more information.
Parametric Test
ACS can be used for process control monitoring (PCM) and other related applications. Because of its rich interactive GUI, it is designed more for low-volume or lab applications with a variety of semi-custom hardware configurations.
Click on a Measurement Capability on the left to view it's Description
ACS Software
ACS supports a wide range of semi-automatic and fully automatic probers for measuring production-wafer test structures. Designed mainly for use by device engineers in a lab or offline setting, ACS provides a rich GUI for interactive testing, frequent adjustments to test plans, and in-depth results analysis. Click here for more information.
S500 Integrated Test Systems
S500 Integrated Test Systems provide custom configurations to meet specific parametric measurement requirements outside the standard configurations of Keithley’s S530 Parametric Test System. Choose from a wide range of instrument measurement capability, and system configurations with or without switching. Click here for more information.
S530 Parametric Test Systems
In addition to fast precise measurements, S530 Parametric Test Systems include system-level specifications, diagnostics, and SEMI standards compliance. While KTE is the standard S530 software to meet full production requirements, ACS can alternatively be used with the S530 for more interactive testing in a lab or offline environment. Click here for more information.
