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| Automated Characterization Suite (ACS) Test Systems |
| Part Number
: ACS |
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ACS integrated test systems are highly configurable, instrument based systems for semiconductor characterization at the device, wafer, or cassette level; offering unique measurement capability with powerful and flexible automation oriented software. Keithley's proven instruments and measurements are the core of the system, which is controlled by the ACS (Automated Characterization Suite) software. Our ACS systems fill the gap between interactive laboratory based tools and high cost and high throughput production test tools. |
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- Fully customizable systems that can include:
- Configurations that range from bench-top to full-height racks of instrumentation
- Wafer level and cassette level automation
- Compatibility with popular semi- and fully-automatic wafer probers
- Test setup tightly integrated with wafer setup
- Interactive prober control for setup and analysis
- Binning and wafer mapping
- Interactive graphical results displayed at both test setup and cassette level review
- Configurable, real time results plotted during automation
- Report generation and summary tool
- Integrated test script development tools
- Extensive parametric test library for both Series 2600 and Model 4200-SCS
- Advanced Reliability (WLR) Testing
- Multi-Site Parallel Wafer/Die Sort
- SMU-Per-Pin WLR Testing
- Automated Device Characterization
- Hot Carrier Injection (HCI)
- Gate Oxide Integrity (TDDB, VRAMP, JRAMP
- Isothermal Electromigration
- Bias Temperature Instability (NBTI and PBTI)
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CALL NUMBER
1-800-935-5595 (US Only)
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