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Source Measurement Units (SMUs)

Keithley Pioneered SMU development over 20 years ago
Today, our award-winning SMU instruments and systems have evolved into seven distinct product families designed to keep pace with your evolving test requirements.

2400 SourceMeter® SMU Instruments

Model 2401 Low Voltage SourceMeter Instrument
  • Family of single-channel models with I-V capability from 1100V to 100nV and 10.5A pulse to 1pA
  • Smart alternative to separate Power Supplies and Digital Multimeters (DMMs)
  • Convenient DMM-like user interface
  • Model 2401 pictured on right. Click image to view rest of 2400 Series.

2600B System SourceMeter® SMU Instruments

2604B SourceMeter SMU Instrument, 2-Channel, (100fA, 40V, 3A DC/10A Pulse), Bench-Top Version
  • Family of dual- or single-channel models with I-V capability from 10A pulse to 0.1fA and 200V to 100nV
  • TSP® (Test Script Processor) technology for best-in-class throughput and lowest cost of test
  • Browser-based GUI enables testing on any PC from anywhere in the world
  • Model 2604B pictured on right. Click image to view rest of 2600B Series.

2650A High Power System SourceMeter® SMU Instruments

Model 2657A High Power System SourceMeter Instrument with up to 180W of DC or pulsed power (+/-3000V@20mA, +/-1500V@120mA)
  • Source and measure up to 3kV or 50A pulse, with best-in-class low current resolution
  • Up to 2000W pulse or 200W DC power
  • Optimized for characterizing and testing high power semiconductors,electronics, and materials
  • Model 2657A pictured on right. Click image to view rest of 2650A Series.

S530 Parametric Test systems

Series S530 Parametric Test Systems
  • High-speed semiconductor parametric testing with low cost of ownership
  • Designed for production and lab environments managing a broad range of devices and product wafers
  • Proven SMU instrumentation technology ensures high measurement accuracy and repeatability

S500 Integrated Test Systems

S500 Integrated Test System
  • Highly configurable and scalable SMU instrument-based system
  • Semiconductor device testing along with Automated Characterization Suite (ACS) at the device, wafer, or cassette level
  • Ideal for SMU-per-pin Wafer Level Reliability (WLR) testing, high speed parallel test, die sort, and Process Control Monitoring (PCM)

High Power Curve Tracer Solutions

Parametric Curve Tracer Configurations
  • 3 kV/100A high power characterization
  • Full range of C-V capability
  • Low start-up cost and expandable when funding allows
  • Reconfigure your test system as requirements change
  • Comprehensive software to easily characterize power devices
  • User-modifiable application tests makes it easy to make complicated measurements

4200-SCS Parameter Analyzer

4200 Semiconductor Characterization Systems
  • Fully integrated I-V, C-V and Pulse in one analyzer
  • Configured to meet your test needs, flexible for tomorrow’s ever changing requirements
  • Intuitive software to easily set up tests and capture/analyze data
  • Ultra-fast I-V modules synchronized for transient, waveform capture and pulsed I-V capabilities
  • Over 450 user-modifiable application tests makes it easy to make complicated measurements
  • Prober and temperature controller drivers
 
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