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Semiconductor Parametric Test Systems

Complete DC and C-V measurement solution

Keithley's S530 Semiconductor Parametric Test Systems are engineered to handle all the DC and C-V measurements required in process control monitoring, process reliability monitoring, and device characterization. These parametric tests are designed for use in production and lab environments that entail a broad range of devices and technologies for parametric testing.

S530 Low Current

pA current measurement capability

20W SMUs provide up to 1A or 200V

Up to 8 SMUs and 48 pins full Kelvin

Compatible with fully automatic probers

C-V measurements up to 1MHz

S530 High Voltage

20W SMUs provide up to 1A or 200V

1kV SMU to any system pin

Up to 7 SMUs and 24 pins full Kelvin

Compatible with fully automatic probers

C-V measurements up to 1MHz

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