Keithley's new line of S530 Parametric Test Systems are built on our proven sourcing and measurement technology and are engineered to handle all the DC and C-V measurements required in process control monitoring, process reliability monitoring, and device characterization. Keithley has more than 30 years of experience in delivering a wide range of standard and custom parametric test systems to semiconductor industry customers around the world.

Optimized for High-Mix Test Environments

S530 parametric test systems are designed to meet the needs of production and lab environments that must handle a broad range of devices and technologies, offering industry-leading test plan flexibility, automation, probe station integration, and test data management capabilities. Three different models of the S530 systems are available to address the needs of different types of applications.

Simple Software Migration and High Hardware Reuse

S530 systems are designed to simplify startup and maximize reuse of your existing test resources. For example, the Automated Characterization Suite (ACS) software that controls these systems is compatible with many new and legacy automatic probe stations. Additionally, the S530's cabled-out configuration makes it easy to adapt to allow reuse of your current probe card library. Several optional applications services are available to help you continue getting the full value of your existing prober and probe card investments. Assistance is also available to speed the development of new test recipes or conversion of your current ones for use with S530 systems.

A System Configuration for Every Low- to Medium-Volume Application

Three different standard S530 Parametric Test System configurations are available to address different parametric test application environments. The S530 Basic System offers the industry's most cost-effective full-featured parametric tester; it includes powerful sourcing up to 1A or 200V with nominal measurement sensitivity, so it's suitable for many general-purpose process monitoring applications. The S530 Low Current System is built on an ultra-low-leakage switch matrix and sensitive measurement technology that provides sub-picoamp measurement resolution. This version of the system provides low current guarding all the way to the probe card, which makes it ideal for characterizing sub-micron silicon MOS technologies. The S530 High Voltage System can source up to 1000V for use in the difficult breakdown and leakage tests that automotive electronics and power management test applications demand.